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Beilstein J. Nanotechnol. 2024, 15, 367–375, doi:10.3762/bjnano.15.33
Figure 1: A. AFM images of pristine and 100 keV Ar+ ion-irradiated Si samples. (a) Pristine and irradiated sa...
Figure 2: A: AFM images of pristine and 100 keV Ar+ ion-irradiated Ge samples (a) pristine, (b) 3 × 1017, (c)...
Figure 3: TEM images of A. Si and B. Ge samples irradiated with 9 × 1017 ions/cm2, with corresponding SAED pa...
Figure 4: Aligned spectra for (A) Ge and (B) Si targets before and after ion irradiation with 100 keV Ar+ ion...
Figure 5: Damage fractions calculated for (A) Si and (B) Ge after irradiation (using the DICADA code. (C) Den...
Figure 6: Schematic representation of various defects produced due to low-energy ion interaction with target ...